Characteristics of NEMS piezoresistive silicon nanowires pressure sensors with various diaphragm layers

10.1016/j.proeng.2011.12.354

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Bibliographic Details
Main Authors:	Lou, L., Zhang, S., Lim, L., Park, W.-T., Feng, H., Kwong, D.-L., Lee, C.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Diaphragm Nano-electro-mechanical systems (NEMS) Piezoresistive silicon nanowire Pressure sensor Thin film
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/83535
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-83535
record_format	dspace
spelling	sg-nus-scholar.10635-835352023-10-30T07:14:03Z Characteristics of NEMS piezoresistive silicon nanowires pressure sensors with various diaphragm layers Lou, L. Zhang, S. Lim, L. Park, W.-T. Feng, H. Kwong, D.-L. Lee, C. ELECTRICAL & COMPUTER ENGINEERING Diaphragm Nano-electro-mechanical systems (NEMS) Piezoresistive silicon nanowire Pressure sensor Thin film 10.1016/j.proeng.2011.12.354 Procedia Engineering 25 1433-1436 2014-10-07T04:42:19Z 2014-10-07T04:42:19Z 2011 Conference Paper Lou, L., Zhang, S., Lim, L., Park, W.-T., Feng, H., Kwong, D.-L., Lee, C. (2011). Characteristics of NEMS piezoresistive silicon nanowires pressure sensors with various diaphragm layers. Procedia Engineering 25 : 1433-1436. ScholarBank@NUS Repository. https://doi.org/10.1016/j.proeng.2011.12.354 18777058 http://scholarbank.nus.edu.sg/handle/10635/83535 000300512400351 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Diaphragm Nano-electro-mechanical systems (NEMS) Piezoresistive silicon nanowire Pressure sensor Thin film
spellingShingle	Diaphragm Nano-electro-mechanical systems (NEMS) Piezoresistive silicon nanowire Pressure sensor Thin film Lou, L. Zhang, S. Lim, L. Park, W.-T. Feng, H. Kwong, D.-L. Lee, C. Characteristics of NEMS piezoresistive silicon nanowires pressure sensors with various diaphragm layers
description	10.1016/j.proeng.2011.12.354
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Lou, L. Zhang, S. Lim, L. Park, W.-T. Feng, H. Kwong, D.-L. Lee, C.
format	Conference or Workshop Item
author	Lou, L. Zhang, S. Lim, L. Park, W.-T. Feng, H. Kwong, D.-L. Lee, C.
author_sort	Lou, L.
title	Characteristics of NEMS piezoresistive silicon nanowires pressure sensors with various diaphragm layers
title_short	Characteristics of NEMS piezoresistive silicon nanowires pressure sensors with various diaphragm layers
title_full	Characteristics of NEMS piezoresistive silicon nanowires pressure sensors with various diaphragm layers
title_fullStr	Characteristics of NEMS piezoresistive silicon nanowires pressure sensors with various diaphragm layers
title_full_unstemmed	Characteristics of NEMS piezoresistive silicon nanowires pressure sensors with various diaphragm layers
title_sort	characteristics of nems piezoresistive silicon nanowires pressure sensors with various diaphragm layers
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/83535
_version_	1781784365179600896

Characteristics of NEMS piezoresistive silicon nanowires pressure sensors with various diaphragm layers

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