PDMS-coated piezoresistive NEMS diaphragm for chloroform vapor detection

PDMS-coated piezoresistive NEMS diaphragm for chloroform vapor detection

10.1109/LED.2012.2195152

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Bibliographic Details
Main Authors: Guo, H., Lou, L., Chen, X., Lee, C.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Subjects:
Chloroform vapor sensor
nanoelectromechanical systems (NEMS) diaphragm
piezoresistive silicon nanowires (SiNWs)
polydimethylsiloxane (PDMS) film
Online Access:http://scholarbank.nus.edu.sg/handle/10635/57002
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/57002

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