PDMS-coated piezoresistive NEMS diaphragm for chloroform vapor detection

10.1109/LED.2012.2195152

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Bibliographic Details
Main Authors:	Guo, H., Lou, L., Chen, X., Lee, C.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Subjects:	Chloroform vapor sensor nanoelectromechanical systems (NEMS) diaphragm piezoresistive silicon nanowires (SiNWs) polydimethylsiloxane (PDMS) film
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/57002
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-57002
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spelling	sg-nus-scholar.10635-570022023-10-30T20:56:07Z PDMS-coated piezoresistive NEMS diaphragm for chloroform vapor detection Guo, H. Lou, L. Chen, X. Lee, C. ELECTRICAL & COMPUTER ENGINEERING Chloroform vapor sensor nanoelectromechanical systems (NEMS) diaphragm piezoresistive silicon nanowires (SiNWs) polydimethylsiloxane (PDMS) film 10.1109/LED.2012.2195152 IEEE Electron Device Letters 33 7 1078-1080 EDLED 2014-06-17T03:01:08Z 2014-06-17T03:01:08Z 2012 Article Guo, H., Lou, L., Chen, X., Lee, C. (2012). PDMS-coated piezoresistive NEMS diaphragm for chloroform vapor detection. IEEE Electron Device Letters 33 (7) : 1078-1080. ScholarBank@NUS Repository. https://doi.org/10.1109/LED.2012.2195152 07413106 http://scholarbank.nus.edu.sg/handle/10635/57002 000305835300054 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Chloroform vapor sensor nanoelectromechanical systems (NEMS) diaphragm piezoresistive silicon nanowires (SiNWs) polydimethylsiloxane (PDMS) film
spellingShingle	Chloroform vapor sensor nanoelectromechanical systems (NEMS) diaphragm piezoresistive silicon nanowires (SiNWs) polydimethylsiloxane (PDMS) film Guo, H. Lou, L. Chen, X. Lee, C. PDMS-coated piezoresistive NEMS diaphragm for chloroform vapor detection
description	10.1109/LED.2012.2195152
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Guo, H. Lou, L. Chen, X. Lee, C.
format	Article
author	Guo, H. Lou, L. Chen, X. Lee, C.
author_sort	Guo, H.
title	PDMS-coated piezoresistive NEMS diaphragm for chloroform vapor detection
title_short	PDMS-coated piezoresistive NEMS diaphragm for chloroform vapor detection
title_full	PDMS-coated piezoresistive NEMS diaphragm for chloroform vapor detection
title_fullStr	PDMS-coated piezoresistive NEMS diaphragm for chloroform vapor detection
title_full_unstemmed	PDMS-coated piezoresistive NEMS diaphragm for chloroform vapor detection
title_sort	pdms-coated piezoresistive nems diaphragm for chloroform vapor detection
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/57002
_version_	1781781326584610816

PDMS-coated piezoresistive NEMS diaphragm for chloroform vapor detection

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