PDMS-coated piezoresistive NEMS diaphragm for chloroform vapor detection

10.1109/LED.2012.2195152

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Bibliographic Details
Main Authors:	Guo, H., Lou, L., Chen, X., Lee, C.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Subjects:	Chloroform vapor sensor nanoelectromechanical systems (NEMS) diaphragm piezoresistive silicon nanowires (SiNWs) polydimethylsiloxane (PDMS) film
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/57002
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Institution:	National University of Singapore

Description
Summary:	10.1109/LED.2012.2195152

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