Characteristics of NEMS piezoresistive silicon nanowires pressure sensors with various diaphragm layers

• Main Authors: Lou, L., Zhang, S., Lim, L., Park, W.-T., Feng, H., Kwong, D.-L., Lee, C.
• Other Authors: ELECTRICAL & COMPUTER ENGINEERING
• Format: Conference or Workshop Item
• Published: 2014
• Subjects: Diaphragm; Nano-electro-mechanical systems (NEMS); Piezoresistive silicon nanowire; Pressure sensor; Thin film
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/83535
• Institution: National University of Singapore

10.1016/j.proeng.2011.12.354