Surface and subsurface damage investigation and CFD modeling of CMP for optical silicon substrate

• Main Author: Srinivasan, Kaushik.
• Other Authors: Zhong Zhaowei
• Format: Theses and Dissertations
• Language: English
• Published: 2013
• Subjects: DRNTU::Engineering::Mechanical engineering
• Online Access: http://hdl.handle.net/10356/53144
• Institution: Nanyang Technological University

Precision optics and photonic applications using silicon substrates nowadays demand high production efficiency with nano-level surface quality and shallow sub-surface damage. Modem machining technologies need to evolve further to not only improve surface quality but also subsurface morphology. In th...