Heterarchical supervisory control of a linear cluster tool

• Main Author: Wang, Yilai.
• Other Authors: Su Rong
• Format: Final Year Project
• Language: English
• Published: 2013
• Subjects: DRNTU::Engineering::Electrical and electronic engineering
• Online Access: http://hdl.handle.net/10356/54392
• Institution: Nanyang Technological University

In the report, we apply the supervisory control theory to design a controller. We firstly introduce the basic concepts of supervisory control and illustrate a simple two automata share a common resource. The development process of a supervisory controller is shown through the example. Secondly, we consider the application of the theory to a linear cluster tool, wafer making process which requires wafers to travel through all processing machines without any conflict and deadlock. Automata models are built to replicate the behaviors of the system, and a controller is designed to control the system. Lastly, we install the controller on a virtual plant to simulate the wafer making process.