Heterarchical supervisory control of a linear cluster tool

• Main Author: Wang, Yilai.
• Other Authors: Su Rong
• Format: Final Year Project
• Language: English
• Published: 2013
• Subjects: DRNTU::Engineering::Electrical and electronic engineering
• Online Access: http://hdl.handle.net/10356/54392
• Institution: Nanyang Technological University

In the report, we apply the supervisory control theory to design a controller. We firstly introduce the basic concepts of supervisory control and illustrate a simple two automata share a common resource. The development process of a supervisory controller is shown through the example. Secondly, we c...