Fabrication of very high aspect micromold by SU-8 photolithography and electroforming

Microstructures with very high aspect ratio (VHAR) have diverse applications because the increased surface area leads to increased volume handling and sensitivity desired for many MicroElectro Systems (MEMS).

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Bibliographic Details
Main Author:	Zhang, Jun
Other Authors:	Chan Bee Eng, Mary
Format:	Theses and Dissertations
Published:	2008
Subjects:	DRNTU::Engineering::Manufacturing
Online Access:	https://hdl.handle.net/10356/5524
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Institution:	Nanyang Technological University

id	sg-ntu-dr.10356-5524
record_format	dspace
spelling	sg-ntu-dr.10356-55242023-03-11T17:44:15Z Fabrication of very high aspect micromold by SU-8 photolithography and electroforming Zhang, Jun Chan Bee Eng, Mary School of Mechanical and Aerospace Engineering DRNTU::Engineering::Manufacturing Microstructures with very high aspect ratio (VHAR) have diverse applications because the increased surface area leads to increased volume handling and sensitivity desired for many MicroElectro Systems (MEMS). DOCTOR OF PHILOSOPHY (MAE) 2008-09-17T10:52:39Z 2008-09-17T10:52:39Z 2007 2007 Thesis Zhang, J. (2007). Fabrication of very high aspect micromold by SU-8 photolithography and electroforming. Doctoral thesis, Nanyang Technological University, Singapore. https://hdl.handle.net/10356/5524 10.32657/10356/5524 Nanyang Technological University application/pdf
institution	Nanyang Technological University
building	NTU Library
continent	Asia
country	Singapore Singapore
content_provider	NTU Library
collection	DR-NTU
topic	DRNTU::Engineering::Manufacturing
spellingShingle	DRNTU::Engineering::Manufacturing Zhang, Jun Fabrication of very high aspect micromold by SU-8 photolithography and electroforming
description	Microstructures with very high aspect ratio (VHAR) have diverse applications because the increased surface area leads to increased volume handling and sensitivity desired for many MicroElectro Systems (MEMS).
author2	Chan Bee Eng, Mary
author_facet	Chan Bee Eng, Mary Zhang, Jun
format	Theses and Dissertations
author	Zhang, Jun
author_sort	Zhang, Jun
title	Fabrication of very high aspect micromold by SU-8 photolithography and electroforming
title_short	Fabrication of very high aspect micromold by SU-8 photolithography and electroforming
title_full	Fabrication of very high aspect micromold by SU-8 photolithography and electroforming
title_fullStr	Fabrication of very high aspect micromold by SU-8 photolithography and electroforming
title_full_unstemmed	Fabrication of very high aspect micromold by SU-8 photolithography and electroforming
title_sort	fabrication of very high aspect micromold by su-8 photolithography and electroforming
publishDate	2008
url	https://hdl.handle.net/10356/5524
_version_	1761781590197796864

Fabrication of very high aspect micromold by SU-8 photolithography and electroforming

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