Simulation, modeling and parameter extraction studies in EBIC mode of SEM

• Main Author: Tan, Chee Chin
• Other Authors: K Radhakrishnan
• Format: Theses and Dissertations
• Language: English
• Published: 2014
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Semiconductors
• Online Access: http://hdl.handle.net/10356/55434
• Institution: Nanyang Technological University

The electron-beam-induced current (EBIC) technique using scanning electron microscope (SEM) is one of the powerful tools for the characterization and failure analysis of semiconductor materials and devices, particularly the characterization of the minority carriers transport properties. These inclu...