Parallel unstructured grid DSMC for the study of molecular gas dynamics in semi-conductor manufacturing

Traditionally gas flow has been modelled at the macroscopic level. This model regards gas as a continuum medium and is described in terms of its macroscopic parameters, such as velocity, pressure and temperature. The Navier-Stokes equations provide an accurate description of the gas as a continuum....

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Main Author: Singh, Abhinav.
Other Authors: Zhao, Yong
Format: Theses and Dissertations
Published: 2008
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Online Access:http://hdl.handle.net/10356/5784
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Institution: Nanyang Technological University
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spelling sg-ntu-dr.10356-57842023-03-11T17:26:18Z Parallel unstructured grid DSMC for the study of molecular gas dynamics in semi-conductor manufacturing Singh, Abhinav. Zhao, Yong School of Mechanical and Production Engineering DRNTU::Engineering::Mechanical engineering::Fluid mechanics Traditionally gas flow has been modelled at the macroscopic level. This model regards gas as a continuum medium and is described in terms of its macroscopic parameters, such as velocity, pressure and temperature. The Navier-Stokes equations provide an accurate description of the gas as a continuum. But the error in Navier-Stokes results becomes significant when the Knudsen number exceeds 0.1. Alternatively, gas flow can be described at the microscopic level, which recognizes the particulate nature of gas. The mathematical model at this level is the Boltzmann equation. Numerical solution of this equation is indirectly achieved through a method called Direct Simulation Monte Carlo (DSMC). Master of Engineering (MPE) 2008-09-17T10:59:00Z 2008-09-17T10:59:00Z 2000 2000 Thesis http://hdl.handle.net/10356/5784 Nanyang Technological University application/pdf
institution Nanyang Technological University
building NTU Library
continent Asia
country Singapore
Singapore
content_provider NTU Library
collection DR-NTU
topic DRNTU::Engineering::Mechanical engineering::Fluid mechanics
spellingShingle DRNTU::Engineering::Mechanical engineering::Fluid mechanics
Singh, Abhinav.
Parallel unstructured grid DSMC for the study of molecular gas dynamics in semi-conductor manufacturing
description Traditionally gas flow has been modelled at the macroscopic level. This model regards gas as a continuum medium and is described in terms of its macroscopic parameters, such as velocity, pressure and temperature. The Navier-Stokes equations provide an accurate description of the gas as a continuum. But the error in Navier-Stokes results becomes significant when the Knudsen number exceeds 0.1. Alternatively, gas flow can be described at the microscopic level, which recognizes the particulate nature of gas. The mathematical model at this level is the Boltzmann equation. Numerical solution of this equation is indirectly achieved through a method called Direct Simulation Monte Carlo (DSMC).
author2 Zhao, Yong
author_facet Zhao, Yong
Singh, Abhinav.
format Theses and Dissertations
author Singh, Abhinav.
author_sort Singh, Abhinav.
title Parallel unstructured grid DSMC for the study of molecular gas dynamics in semi-conductor manufacturing
title_short Parallel unstructured grid DSMC for the study of molecular gas dynamics in semi-conductor manufacturing
title_full Parallel unstructured grid DSMC for the study of molecular gas dynamics in semi-conductor manufacturing
title_fullStr Parallel unstructured grid DSMC for the study of molecular gas dynamics in semi-conductor manufacturing
title_full_unstemmed Parallel unstructured grid DSMC for the study of molecular gas dynamics in semi-conductor manufacturing
title_sort parallel unstructured grid dsmc for the study of molecular gas dynamics in semi-conductor manufacturing
publishDate 2008
url http://hdl.handle.net/10356/5784
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