Parallel unstructured grid DSMC for the study of molecular gas dynamics in semi-conductor manufacturing
Traditionally gas flow has been modelled at the macroscopic level. This model regards gas as a continuum medium and is described in terms of its macroscopic parameters, such as velocity, pressure and temperature. The Navier-Stokes equations provide an accurate description of the gas as a continuum....
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| Format: | Theses and Dissertations |
| Published: |
2008
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| Online Access: | http://hdl.handle.net/10356/5784 |
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| Institution: | Nanyang Technological University |