Parallel unstructured grid DSMC for the study of molecular gas dynamics in semi-conductor manufacturing

Traditionally gas flow has been modelled at the macroscopic level. This model regards gas as a continuum medium and is described in terms of its macroscopic parameters, such as velocity, pressure and temperature. The Navier-Stokes equations provide an accurate description of the gas as a continuum....

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Bibliographic Details
Main Author: Singh, Abhinav.
Other Authors: Zhao, Yong
Format: Theses and Dissertations
Published: 2008
Subjects:
Online Access:http://hdl.handle.net/10356/5784
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Institution: Nanyang Technological University
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