Parallel unstructured grid DSMC for the study of molecular gas dynamics in semi-conductor manufacturing
Traditionally gas flow has been modelled at the macroscopic level. This model regards gas as a continuum medium and is described in terms of its macroscopic parameters, such as velocity, pressure and temperature. The Navier-Stokes equations provide an accurate description of the gas as a continuum....
Saved in:
| 主要作者: | |
|---|---|
| 其他作者: | |
| 格式: | Theses and Dissertations |
| 出版: |
2008
|
| 主題: | |
| 在線閱讀: | http://hdl.handle.net/10356/5784 |
| 標簽: |
添加標簽
沒有標簽, 成為第一個標記此記錄!
|
| 機構: | Nanyang Technological University |