Design and fabrication of single wafer mems accelerometers with optimized flexures
A MEMS accelerometer used in air bag deployment is designed and fabricated. Three types of flexure designs were studied and optimized to achieve the desired natural frequency of the accelerometer.
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| Format: | Theses and Dissertations |
| Published: |
2008
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| Online Access: | http://hdl.handle.net/10356/6003 |
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| Institution: | Nanyang Technological University |