Design and fabrication of single wafer mems accelerometers with optimized flexures
A MEMS accelerometer used in air bag deployment is designed and fabricated. Three types of flexure designs were studied and optimized to achieve the desired natural frequency of the accelerometer.
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| 格式: | Theses and Dissertations |
| 出版: |
2008
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| 主題: | |
| 在線閱讀: | http://hdl.handle.net/10356/6003 |
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| 機構: | Nanyang Technological University |