Design and fabrication of single wafer mems accelerometers with optimized flexures

A MEMS accelerometer used in air bag deployment is designed and fabricated. Three types of flexure designs were studied and optimized to achieve the desired natural frequency of the accelerometer.

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Bibliographic Details
Main Author:	Lim, Chun Kiat.
Other Authors:	Miao, Jianmin
Format:	Theses and Dissertations
Published:	2008
Subjects:	DRNTU::Engineering::Manufacturing
Online Access:	http://hdl.handle.net/10356/6003
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Institution:	Nanyang Technological University

id	sg-ntu-dr.10356-6003
record_format	dspace
spelling	sg-ntu-dr.10356-60032023-03-11T17:32:30Z Design and fabrication of single wafer mems accelerometers with optimized flexures Lim, Chun Kiat. Miao, Jianmin School of Mechanical and Production Engineering DRNTU::Engineering::Manufacturing A MEMS accelerometer used in air bag deployment is designed and fabricated. Three types of flexure designs were studied and optimized to achieve the desired natural frequency of the accelerometer. Master of Science (Precision Engineering) 2008-09-17T11:04:35Z 2008-09-17T11:04:35Z 2004 2004 Thesis http://hdl.handle.net/10356/6003 Nanyang Technological University application/pdf
institution	Nanyang Technological University
building	NTU Library
continent	Asia
country	Singapore Singapore
content_provider	NTU Library
collection	DR-NTU
topic	DRNTU::Engineering::Manufacturing
spellingShingle	DRNTU::Engineering::Manufacturing Lim, Chun Kiat. Design and fabrication of single wafer mems accelerometers with optimized flexures
description	A MEMS accelerometer used in air bag deployment is designed and fabricated. Three types of flexure designs were studied and optimized to achieve the desired natural frequency of the accelerometer.
author2	Miao, Jianmin
author_facet	Miao, Jianmin Lim, Chun Kiat.
format	Theses and Dissertations
author	Lim, Chun Kiat.
author_sort	Lim, Chun Kiat.
title	Design and fabrication of single wafer mems accelerometers with optimized flexures
title_short	Design and fabrication of single wafer mems accelerometers with optimized flexures
title_full	Design and fabrication of single wafer mems accelerometers with optimized flexures
title_fullStr	Design and fabrication of single wafer mems accelerometers with optimized flexures
title_full_unstemmed	Design and fabrication of single wafer mems accelerometers with optimized flexures
title_sort	design and fabrication of single wafer mems accelerometers with optimized flexures
publishDate	2008
url	http://hdl.handle.net/10356/6003
_version_	1761781857956921344

Design and fabrication of single wafer mems accelerometers with optimized flexures

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