Characterization of structural and optical properties of Zinc Oxide thin films

• Main Author: Liu, Yuchan
• Other Authors: Hsieh Jang-Hsing, Joe
• Format: Theses and Dissertations
• Published: 2008
• Subjects: DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
• Online Access: https://hdl.handle.net/10356/6069
• Institution: Nanyang Technological University

The objective of this thesis is to determine the optical properties of ZnO thin films with spectroscopic ellipsometry in a wide spectral region covering the both regimes of below and above the ZnO bandgap. Three dispersion models, namely, Sellmeier dispersion model, Cauchy model and Forouhi-Bloomer...