Optical nanoelecteromechanical systems (NEMS) devices and nano fabrication processes

This doctorate thesis focuses on the design, fabrication and testing of novel optical nanoelectromechanical systems (NEMS) devices. Specifically, a nano-actuator, a variable optical attenuator (VOA) and an optomechanical memory have been fabricated by nano-silicon-photonic fabrication processes. The...

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Main Author: Dong, Bin
Other Authors: Liu Aiqun
Format: Theses and Dissertations
Language:English
Published: 2015
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Online Access:https://hdl.handle.net/10356/62148
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Institution: Nanyang Technological University
Language: English
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spelling sg-ntu-dr.10356-621482023-07-04T16:30:40Z Optical nanoelecteromechanical systems (NEMS) devices and nano fabrication processes Dong, Bin Liu Aiqun School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems This doctorate thesis focuses on the design, fabrication and testing of novel optical nanoelectromechanical systems (NEMS) devices. Specifically, a nano-actuator, a variable optical attenuator (VOA) and an optomechanical memory have been fabricated by nano-silicon-photonic fabrication processes. The first part of the thesis reports a NEMS actuator driven by optical gradient force. The optical force driven actuator realized by Q-factor modulation of the ring resonator can achieve an actuation range of 14 nm with a resolution of 0.18 nm. An optical displacement sensor is integrated to measure the actuation distance through optomechanical effects. The second part focuses on the development of a NEMS variable optical attenuator. In this design, optical attenuation is realized via a nano-waveguide-based optical directional coupler where the gap between waveguides is modulated by optical gradient force. Optical intensity can be attenuated to 10% of the original value with an actuation distance of at least 150 nm by tuning the wavelength of control light by 2 nm. The third part works on the optomechanical memory based on an optical force-induced bistability. A doubly-clamped silicon beam is actuated by the optical gradient force and bistability occurs as a result of nonlinearity of the optomechanical effects. The memory states can be switched by controlling the optical power from -10 dBm to -6 dBm. The switching speed is less than 150 ns. DOCTOR OF PHILOSOPHY (EEE) 2015-02-10T07:30:50Z 2015-02-10T07:30:50Z 2015 2015 Thesis Dong, B. (2015). Optical nanoelecteromechanical systems (NEMS) devices and nano fabrication processes. Doctoral thesis, Nanyang Technological University, Singapore. https://hdl.handle.net/10356/62148 10.32657/10356/62148 en 192 p. application/pdf
institution Nanyang Technological University
building NTU Library
continent Asia
country Singapore
Singapore
content_provider NTU Library
collection DR-NTU
language English
topic DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems
spellingShingle DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems
Dong, Bin
Optical nanoelecteromechanical systems (NEMS) devices and nano fabrication processes
description This doctorate thesis focuses on the design, fabrication and testing of novel optical nanoelectromechanical systems (NEMS) devices. Specifically, a nano-actuator, a variable optical attenuator (VOA) and an optomechanical memory have been fabricated by nano-silicon-photonic fabrication processes. The first part of the thesis reports a NEMS actuator driven by optical gradient force. The optical force driven actuator realized by Q-factor modulation of the ring resonator can achieve an actuation range of 14 nm with a resolution of 0.18 nm. An optical displacement sensor is integrated to measure the actuation distance through optomechanical effects. The second part focuses on the development of a NEMS variable optical attenuator. In this design, optical attenuation is realized via a nano-waveguide-based optical directional coupler where the gap between waveguides is modulated by optical gradient force. Optical intensity can be attenuated to 10% of the original value with an actuation distance of at least 150 nm by tuning the wavelength of control light by 2 nm. The third part works on the optomechanical memory based on an optical force-induced bistability. A doubly-clamped silicon beam is actuated by the optical gradient force and bistability occurs as a result of nonlinearity of the optomechanical effects. The memory states can be switched by controlling the optical power from -10 dBm to -6 dBm. The switching speed is less than 150 ns.
author2 Liu Aiqun
author_facet Liu Aiqun
Dong, Bin
format Theses and Dissertations
author Dong, Bin
author_sort Dong, Bin
title Optical nanoelecteromechanical systems (NEMS) devices and nano fabrication processes
title_short Optical nanoelecteromechanical systems (NEMS) devices and nano fabrication processes
title_full Optical nanoelecteromechanical systems (NEMS) devices and nano fabrication processes
title_fullStr Optical nanoelecteromechanical systems (NEMS) devices and nano fabrication processes
title_full_unstemmed Optical nanoelecteromechanical systems (NEMS) devices and nano fabrication processes
title_sort optical nanoelecteromechanical systems (nems) devices and nano fabrication processes
publishDate 2015
url https://hdl.handle.net/10356/62148
_version_ 1772828757672853504