Optical nanoelecteromechanical systems (NEMS) devices and nano fabrication processes

• Main Author: Dong, Bin
• Other Authors: Liu Aiqun
• Format: Theses and Dissertations
• Language: English
• Published: 2015
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems
• Online Access: https://hdl.handle.net/10356/62148
• Institution: Nanyang Technological University

This doctorate thesis focuses on the design, fabrication and testing of novel optical nanoelectromechanical systems (NEMS) devices. Specifically, a nano-actuator, a variable optical attenuator (VOA) and an optomechanical memory have been fabricated by nano-silicon-photonic fabrication processes. The...