Optical nanoelecteromechanical systems (NEMS) devices and nano fabrication processes
This doctorate thesis focuses on the design, fabrication and testing of novel optical nanoelectromechanical systems (NEMS) devices. Specifically, a nano-actuator, a variable optical attenuator (VOA) and an optomechanical memory have been fabricated by nano-silicon-photonic fabrication processes. The...
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| 格式: | Theses and Dissertations |
| 語言: | English |
| 出版: |
2015
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| 在線閱讀: | https://hdl.handle.net/10356/62148 |
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| 機構: | Nanyang Technological University |
| 語言: | English |