Monolithic integration of an acceleration sensor based on an external cavity laser with a micromachined mirror
This project deals with the system integration of a displacement micro-sensor based on an external cavity laser configuration. The sensor has shown a resolution of 5 pico-meter per square root hertz (pm/VHz) and aims to be used for developing a high resolution acceleration sensor. However, it is bas...
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| Format: | Theses and Dissertations |
| Published: |
2008
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| Online Access: | http://hdl.handle.net/10356/6435 |
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| Institution: | Nanyang Technological University |
| Summary: | This project deals with the system integration of a displacement micro-sensor based on an external cavity laser configuration. The sensor has shown a resolution of 5 pico-meter per square root hertz (pm/VHz) and aims to be used for developing a high resolution acceleration sensor. However, it is based on a hybrid configuration, with a laser diode, a photodetector and a MEMS mirror, that need to be integrated in the same package. This research effort was focused on the development of such a package. |
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