Monolithic integration of an acceleration sensor based on an external cavity laser with a micromachined mirror
This project deals with the system integration of a displacement micro-sensor based on an external cavity laser configuration. The sensor has shown a resolution of 5 pico-meter per square root hertz (pm/VHz) and aims to be used for developing a high resolution acceleration sensor. However, it is bas...
Saved in:
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Theses and Dissertations |
| Published: |
2008
|
| Subjects: | |
| Online Access: | http://hdl.handle.net/10356/6435 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | Nanyang Technological University |