Microforce sensor design and fabrication

Design and fabricate a microforce sensor, with a focus on manufacturability. The microforce range of interest is between 0.1 mN to 100 mN with a bandwidth of going from DC to at least 10 Hz. We use MEMS technology to fabricate silicon cantilever built with build-in piezoresistors in a Wheatstone bri...

Full description

Saved in:
Bibliographic Details
Main Author: Xu, Guoming.
Other Authors: Chollet, Franck Alexis
Format: Theses and Dissertations
Published: 2008
Subjects:
Online Access:http://hdl.handle.net/10356/5429
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: Nanyang Technological University