Microforce sensor design and fabrication
Design and fabricate a microforce sensor, with a focus on manufacturability. The microforce range of interest is between 0.1 mN to 100 mN with a bandwidth of going from DC to at least 10 Hz. We use MEMS technology to fabricate silicon cantilever built with build-in piezoresistors in a Wheatstone bri...
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| Format: | Theses and Dissertations |
| Published: |
2008
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| Online Access: | http://hdl.handle.net/10356/5429 |
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| Institution: | Nanyang Technological University |
| Summary: | Design and fabricate a microforce sensor, with a focus on manufacturability. The microforce range of interest is between 0.1 mN to 100 mN with a bandwidth of going from DC to at least 10 Hz. We use MEMS technology to fabricate silicon cantilever built with build-in piezoresistors in a Wheatstone bridge circuit configuration. |
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