Microforce sensor design and fabrication
Design and fabricate a microforce sensor, with a focus on manufacturability. The microforce range of interest is between 0.1 mN to 100 mN with a bandwidth of going from DC to at least 10 Hz. We use MEMS technology to fabricate silicon cantilever built with build-in piezoresistors in a Wheatstone bri...
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2008
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| Institution: | Nanyang Technological University |
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sg-ntu-dr.10356-54292023-03-11T17:21:37Z Microforce sensor design and fabrication Xu, Guoming. Chollet, Franck Alexis School of Mechanical and Production Engineering DRNTU::Engineering::Manufacturing::Product engineering Design and fabricate a microforce sensor, with a focus on manufacturability. The microforce range of interest is between 0.1 mN to 100 mN with a bandwidth of going from DC to at least 10 Hz. We use MEMS technology to fabricate silicon cantilever built with build-in piezoresistors in a Wheatstone bridge circuit configuration. Master of Science (Precision Engineering) 2008-09-17T10:50:19Z 2008-09-17T10:50:19Z 2004 2004 Thesis http://hdl.handle.net/10356/5429 Nanyang Technological University application/pdf |
| institution |
Nanyang Technological University |
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NTU Library |
| continent |
Asia |
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Singapore Singapore |
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DRNTU::Engineering::Manufacturing::Product engineering |
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DRNTU::Engineering::Manufacturing::Product engineering Xu, Guoming. Microforce sensor design and fabrication |
| description |
Design and fabricate a microforce sensor, with a focus on manufacturability. The microforce range of interest is between 0.1 mN to 100 mN with a bandwidth of going from DC to at least 10 Hz. We use MEMS technology to fabricate silicon cantilever built with build-in piezoresistors in a Wheatstone bridge circuit configuration. |
| author2 |
Chollet, Franck Alexis |
| author_facet |
Chollet, Franck Alexis Xu, Guoming. |
| format |
Theses and Dissertations |
| author |
Xu, Guoming. |
| author_sort |
Xu, Guoming. |
| title |
Microforce sensor design and fabrication |
| title_short |
Microforce sensor design and fabrication |
| title_full |
Microforce sensor design and fabrication |
| title_fullStr |
Microforce sensor design and fabrication |
| title_full_unstemmed |
Microforce sensor design and fabrication |
| title_sort |
microforce sensor design and fabrication |
| publishDate |
2008 |
| url |
http://hdl.handle.net/10356/5429 |
| _version_ |
1761781856356794368 |