Monolithic integration of an acceleration sensor based on an external cavity laser with a micromachined mirror

This project deals with the system integration of a displacement micro-sensor based on an external cavity laser configuration. The sensor has shown a resolution of 5 pico-meter per square root hertz (pm/VHz) and aims to be used for developing a high resolution acceleration sensor. However, it is bas...

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Bibliographic Details
Main Author:	Tan, Chee Khiang.
Other Authors:	Chollet, Franck Alexis
Format:	Theses and Dissertations
Published:	2008
Subjects:	DRNTU::Engineering::Manufacturing::Product engineering
Online Access:	http://hdl.handle.net/10356/6435
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	Nanyang Technological University

id	sg-ntu-dr.10356-6435
record_format	dspace
spelling	sg-ntu-dr.10356-64352023-03-11T17:08:23Z Monolithic integration of an acceleration sensor based on an external cavity laser with a micromachined mirror Tan, Chee Khiang. Chollet, Franck Alexis School of Mechanical and Production Engineering DRNTU::Engineering::Manufacturing::Product engineering This project deals with the system integration of a displacement micro-sensor based on an external cavity laser configuration. The sensor has shown a resolution of 5 pico-meter per square root hertz (pm/VHz) and aims to be used for developing a high resolution acceleration sensor. However, it is based on a hybrid configuration, with a laser diode, a photodetector and a MEMS mirror, that need to be integrated in the same package. This research effort was focused on the development of such a package. Master of Science (Smart Product Design) 2008-09-17T11:14:53Z 2008-09-17T11:14:53Z 2003 2003 Thesis http://hdl.handle.net/10356/6435 Nanyang Technological University application/pdf
institution	Nanyang Technological University
building	NTU Library
continent	Asia
country	Singapore Singapore
content_provider	NTU Library
collection	DR-NTU
topic	DRNTU::Engineering::Manufacturing::Product engineering
spellingShingle	DRNTU::Engineering::Manufacturing::Product engineering Tan, Chee Khiang. Monolithic integration of an acceleration sensor based on an external cavity laser with a micromachined mirror
description	This project deals with the system integration of a displacement micro-sensor based on an external cavity laser configuration. The sensor has shown a resolution of 5 pico-meter per square root hertz (pm/VHz) and aims to be used for developing a high resolution acceleration sensor. However, it is based on a hybrid configuration, with a laser diode, a photodetector and a MEMS mirror, that need to be integrated in the same package. This research effort was focused on the development of such a package.
author2	Chollet, Franck Alexis
author_facet	Chollet, Franck Alexis Tan, Chee Khiang.
format	Theses and Dissertations
author	Tan, Chee Khiang.
author_sort	Tan, Chee Khiang.
title	Monolithic integration of an acceleration sensor based on an external cavity laser with a micromachined mirror
title_short	Monolithic integration of an acceleration sensor based on an external cavity laser with a micromachined mirror
title_full	Monolithic integration of an acceleration sensor based on an external cavity laser with a micromachined mirror
title_fullStr	Monolithic integration of an acceleration sensor based on an external cavity laser with a micromachined mirror
title_full_unstemmed	Monolithic integration of an acceleration sensor based on an external cavity laser with a micromachined mirror
title_sort	monolithic integration of an acceleration sensor based on an external cavity laser with a micromachined mirror
publishDate	2008
url	http://hdl.handle.net/10356/6435
_version_	1761781155835674624

Monolithic integration of an acceleration sensor based on an external cavity laser with a micromachined mirror

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