Quasi electrical contact behaviors of metal micro-contacts for micro/nano-electromechanical systems (MEMS/NEMS)

• المؤلف الرئيسي: Qiu, Haodong
• مؤلفون آخرون: Wang Hong
• التنسيق: Theses and Dissertations
• اللغة: English
• منشور في: 2015
• الموضوعات: DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems
• الوصول للمادة أونلاين: https://hdl.handle.net/10356/65051

The electrical contact behavior of metal micro-contacts is of significant importance in various fields of science and engineering, and it has not yet been adequately understood compared to the bulk metal contacts. Specifically, in DC contact type of microelectromechanical (MEMS) or nanoelectromechan...