Quasi electrical contact behaviors of metal micro-contacts for micro/nano-electromechanical systems (MEMS/NEMS)

• 主要作者: Qiu, Haodong
• 其他作者: Wang Hong
• 格式: Theses and Dissertations
• 語言: English
• 出版: 2015
• 主題: DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems
• 在線閱讀: https://hdl.handle.net/10356/65051
• 機構: Nanyang Technological University

The electrical contact behavior of metal micro-contacts is of significant importance in various fields of science and engineering, and it has not yet been adequately understood compared to the bulk metal contacts. Specifically, in DC contact type of microelectromechanical (MEMS) or nanoelectromechan...