Investigations into laser interferometric calibration of 2D scanning stages

• Main Author: Low, Yuen Huat
• Other Authors: Murukeshan Vadakke Matham
• Format: Theses and Dissertations
• Language: English
• Published: 2015
• Subjects: DRNTU::Engineering::Mechanical engineering
• Online Access: http://hdl.handle.net/10356/65153
• Institution: Nanyang Technological University

Coordinate Measuring Machine (CMM) with three moving axes is commonly used for measuring the three dimensional geometrical features of engineering components. Apart from CMM, two-dimensional measuring equipment with a scanning probe is also capable to carry out measurements on engineering components. The accuracy of the measurements of engineering component relies on the performance of measuring equipment. Therefore, it is important to determine the precision and accuracy of measuring equipment. Over the years, the research area in calibration methodologies has been carrying out to investigate and validate the performance of measuring equipment. The calibration instruments, such as laser calibrators are the most commonly employed for calibration on measuring equipment. Many types of mechanical artifacts are also used as a calibrator to carry out calibration on measuring equipment. In this report, the performance of a two dimensional measuring equipment with a scanning probe (Mitutoyo Surtest Extreme SY-3000 CNC Series 178) to be investigated and validated through calibration and measurement will be presented. In particular, the measuring equipment is first investigated through calibration by a laser based system. This is followed by the validation of measurements obtained from a noncalibrated v-groove artifact. From the experimental results, the maximum compensational error of the measuring equipment is found to be 0.0314 mm. The overall calibration and measurement are satisfactory. Further improvement for this project work will be recommended.