Investigations into laser interferometric calibration of 2D scanning stages

Coordinate Measuring Machine (CMM) with three moving axes is commonly used for measuring the three dimensional geometrical features of engineering components. Apart from CMM, two-dimensional measuring equipment with a scanning probe is also capable to carry out measurements on engineering c...

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Main Author: Low, Yuen Huat
Other Authors: Murukeshan Vadakke Matham
Format: Theses and Dissertations
Language:English
Published: 2015
Subjects:
Online Access:http://hdl.handle.net/10356/65153
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Institution: Nanyang Technological University
Language: English
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spelling sg-ntu-dr.10356-651532023-03-11T17:00:29Z Investigations into laser interferometric calibration of 2D scanning stages Low, Yuen Huat Murukeshan Vadakke Matham School of Mechanical and Aerospace Engineering DRNTU::Engineering::Mechanical engineering Coordinate Measuring Machine (CMM) with three moving axes is commonly used for measuring the three dimensional geometrical features of engineering components. Apart from CMM, two-dimensional measuring equipment with a scanning probe is also capable to carry out measurements on engineering components. The accuracy of the measurements of engineering component relies on the performance of measuring equipment. Therefore, it is important to determine the precision and accuracy of measuring equipment. Over the years, the research area in calibration methodologies has been carrying out to investigate and validate the performance of measuring equipment. The calibration instruments, such as laser calibrators are the most commonly employed for calibration on measuring equipment. Many types of mechanical artifacts are also used as a calibrator to carry out calibration on measuring equipment. In this report, the performance of a two dimensional measuring equipment with a scanning probe (Mitutoyo Surtest Extreme SY-3000 CNC Series 178) to be investigated and validated through calibration and measurement will be presented. In particular, the measuring equipment is first investigated through calibration by a laser based system. This is followed by the validation of measurements obtained from a noncalibrated v-groove artifact. From the experimental results, the maximum compensational error of the measuring equipment is found to be 0.0314 mm. The overall calibration and measurement are satisfactory. Further improvement for this project work will be recommended. Master of Science (Precision Engineering) 2015-06-15T05:39:08Z 2015-06-15T05:39:08Z 2014 2014 Thesis http://hdl.handle.net/10356/65153 en 88 p. application/pdf
institution Nanyang Technological University
building NTU Library
continent Asia
country Singapore
Singapore
content_provider NTU Library
collection DR-NTU
language English
topic DRNTU::Engineering::Mechanical engineering
spellingShingle DRNTU::Engineering::Mechanical engineering
Low, Yuen Huat
Investigations into laser interferometric calibration of 2D scanning stages
description Coordinate Measuring Machine (CMM) with three moving axes is commonly used for measuring the three dimensional geometrical features of engineering components. Apart from CMM, two-dimensional measuring equipment with a scanning probe is also capable to carry out measurements on engineering components. The accuracy of the measurements of engineering component relies on the performance of measuring equipment. Therefore, it is important to determine the precision and accuracy of measuring equipment. Over the years, the research area in calibration methodologies has been carrying out to investigate and validate the performance of measuring equipment. The calibration instruments, such as laser calibrators are the most commonly employed for calibration on measuring equipment. Many types of mechanical artifacts are also used as a calibrator to carry out calibration on measuring equipment. In this report, the performance of a two dimensional measuring equipment with a scanning probe (Mitutoyo Surtest Extreme SY-3000 CNC Series 178) to be investigated and validated through calibration and measurement will be presented. In particular, the measuring equipment is first investigated through calibration by a laser based system. This is followed by the validation of measurements obtained from a noncalibrated v-groove artifact. From the experimental results, the maximum compensational error of the measuring equipment is found to be 0.0314 mm. The overall calibration and measurement are satisfactory. Further improvement for this project work will be recommended.
author2 Murukeshan Vadakke Matham
author_facet Murukeshan Vadakke Matham
Low, Yuen Huat
format Theses and Dissertations
author Low, Yuen Huat
author_sort Low, Yuen Huat
title Investigations into laser interferometric calibration of 2D scanning stages
title_short Investigations into laser interferometric calibration of 2D scanning stages
title_full Investigations into laser interferometric calibration of 2D scanning stages
title_fullStr Investigations into laser interferometric calibration of 2D scanning stages
title_full_unstemmed Investigations into laser interferometric calibration of 2D scanning stages
title_sort investigations into laser interferometric calibration of 2d scanning stages
publishDate 2015
url http://hdl.handle.net/10356/65153
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