Investigations into laser interferometric calibration of 2D scanning stages
Coordinate Measuring Machine (CMM) with three moving axes is commonly used for measuring the three dimensional geometrical features of engineering components. Apart from CMM, two-dimensional measuring equipment with a scanning probe is also capable to carry out measurements on engineering c...
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sg-ntu-dr.10356-651532023-03-11T17:00:29Z Investigations into laser interferometric calibration of 2D scanning stages Low, Yuen Huat Murukeshan Vadakke Matham School of Mechanical and Aerospace Engineering DRNTU::Engineering::Mechanical engineering Coordinate Measuring Machine (CMM) with three moving axes is commonly used for measuring the three dimensional geometrical features of engineering components. Apart from CMM, two-dimensional measuring equipment with a scanning probe is also capable to carry out measurements on engineering components. The accuracy of the measurements of engineering component relies on the performance of measuring equipment. Therefore, it is important to determine the precision and accuracy of measuring equipment. Over the years, the research area in calibration methodologies has been carrying out to investigate and validate the performance of measuring equipment. The calibration instruments, such as laser calibrators are the most commonly employed for calibration on measuring equipment. Many types of mechanical artifacts are also used as a calibrator to carry out calibration on measuring equipment. In this report, the performance of a two dimensional measuring equipment with a scanning probe (Mitutoyo Surtest Extreme SY-3000 CNC Series 178) to be investigated and validated through calibration and measurement will be presented. In particular, the measuring equipment is first investigated through calibration by a laser based system. This is followed by the validation of measurements obtained from a noncalibrated v-groove artifact. From the experimental results, the maximum compensational error of the measuring equipment is found to be 0.0314 mm. The overall calibration and measurement are satisfactory. Further improvement for this project work will be recommended. Master of Science (Precision Engineering) 2015-06-15T05:39:08Z 2015-06-15T05:39:08Z 2014 2014 Thesis http://hdl.handle.net/10356/65153 en 88 p. application/pdf |
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DRNTU::Engineering::Mechanical engineering Low, Yuen Huat Investigations into laser interferometric calibration of 2D scanning stages |
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Coordinate Measuring Machine (CMM) with three moving axes is commonly used for
measuring the three dimensional geometrical features of engineering components.
Apart from CMM, two-dimensional measuring equipment with a scanning probe is also
capable to carry out measurements on engineering components. The accuracy of the
measurements of engineering component relies on the performance of measuring
equipment. Therefore, it is important to determine the precision and accuracy of
measuring equipment. Over the years, the research area in calibration methodologies
has been carrying out to investigate and validate the performance of measuring
equipment. The calibration instruments, such as laser calibrators are the most
commonly employed for calibration on measuring equipment. Many types of
mechanical artifacts are also used as a calibrator to carry out calibration on measuring
equipment. In this report, the performance of a two dimensional measuring equipment
with a scanning probe (Mitutoyo Surtest Extreme SY-3000 CNC Series 178) to be
investigated and validated through calibration and measurement will be presented. In
particular, the measuring equipment is first investigated through calibration by a laser
based system. This is followed by the validation of measurements obtained from a noncalibrated
v-groove artifact. From the experimental results, the maximum
compensational error of the measuring equipment is found to be 0.0314 mm. The
overall calibration and measurement are satisfactory. Further improvement for this
project work will be recommended. |
author2 |
Murukeshan Vadakke Matham |
author_facet |
Murukeshan Vadakke Matham Low, Yuen Huat |
format |
Theses and Dissertations |
author |
Low, Yuen Huat |
author_sort |
Low, Yuen Huat |
title |
Investigations into laser interferometric calibration of 2D scanning stages |
title_short |
Investigations into laser interferometric calibration of 2D scanning stages |
title_full |
Investigations into laser interferometric calibration of 2D scanning stages |
title_fullStr |
Investigations into laser interferometric calibration of 2D scanning stages |
title_full_unstemmed |
Investigations into laser interferometric calibration of 2D scanning stages |
title_sort |
investigations into laser interferometric calibration of 2d scanning stages |
publishDate |
2015 |
url |
http://hdl.handle.net/10356/65153 |
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1761781174177366016 |