Investigations into laser interferometric calibration of 2D scanning stages

• Main Author: Low, Yuen Huat
• Other Authors: Murukeshan Vadakke Matham
• Format: Theses and Dissertations
• Language: English
• Published: 2015
• Subjects: DRNTU::Engineering::Mechanical engineering
• Online Access: http://hdl.handle.net/10356/65153
• Institution: Nanyang Technological University

Coordinate Measuring Machine (CMM) with three moving axes is commonly used for measuring the three dimensional geometrical features of engineering components. Apart from CMM, two-dimensional measuring equipment with a scanning probe is also capable to carry out measurements on engineering c...