Automated wafer management system

The purpose of this report is to details the function and reliability test done to the Automated Wafer Management System. The results of these tests will determine the system reliability and whether given functionality works as specified. The anticipated outcome of these tests is to identify the pro...

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Bibliographic Details
Main Author: Lim, Kai Yi
Other Authors: K Radhakrishnan
Format: Final Year Project
Language:English
Published: 2015
Subjects:
Online Access:http://hdl.handle.net/10356/65808
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Institution: Nanyang Technological University
Language: English