Automated wafer management system
The purpose of this report is to details the function and reliability test done to the Automated Wafer Management System. The results of these tests will determine the system reliability and whether given functionality works as specified. The anticipated outcome of these tests is to identify the pro...
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| Format: | Final Year Project |
| Language: | English |
| Published: |
2015
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| Online Access: | http://hdl.handle.net/10356/65808 |
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| Institution: | Nanyang Technological University |
| Language: | English |
| Summary: | The purpose of this report is to details the function and reliability test done to the Automated Wafer Management System. The results of these tests will determine the system reliability and whether given functionality works as specified. The anticipated outcome of these tests is to identify the problems in the system design and functionality. The findings can be used to improve the performance and eliminated failure mode of the system. Through these tests, we have found out the limitations of the equipment and the reliability of the system. These tests have aid in reaching the next milestone of the project. |
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