Novel high-k dielectrics for nanoelectronics

• 主要作者: Chong, Vanessa Meng Meng
• 其他作者: Alfred Tok Iing Yoong
• 格式: Theses and Dissertations
• 語言: English
• 出版: 2016
• 主題: DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Nanoelectronics and interconnects; DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films; DRNTU::Engineering::Nanotechnology
• 在線閱讀: https://hdl.handle.net/10356/68931

The aggressive downsizing in metal-oxide-semiconductor field effect transistors (MOSFET) has been the driving force for performance progress in microelectronics. In association with device parameters related to MOSFET, SiO2 based oxide has already faced to its limit in further thinning due to excess...