Novel high-k dielectrics for nanoelectronics

• Main Author: Chong, Vanessa Meng Meng
• Other Authors: Alfred Tok Iing Yoong
• Format: Theses and Dissertations
• Language: English
• Published: 2016
• Subjects: DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Nanoelectronics and interconnects; DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films; DRNTU::Engineering::Nanotechnology
• Online Access: https://hdl.handle.net/10356/68931
• Institution: Nanyang Technological University

The aggressive downsizing in metal-oxide-semiconductor field effect transistors (MOSFET) has been the driving force for performance progress in microelectronics. In association with device parameters related to MOSFET, SiO2 based oxide has already faced to its limit in further thinning due to excess...