Synthesis and characterization of metal silicides nanostructures

• المؤلف الرئيسي: Li, Shaozhou.
• مؤلفون آخرون: School of Materials Science & Engineering
• التنسيق: Theses and Dissertations
• اللغة: English
• منشور في: 2013
• الموضوعات: DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Nanoelectronics and interconnects
• الوصول للمادة أونلاين: http://hdl.handle.net/10356/51007
• المؤسسة: Nanyang Technological University

Metal silicides have been used extensively in microelectronics devices, such as contacts and local interconnects. With increasing research and development of a bottomup fabrication approach for semiconducting and metallic nanostructures, metal silicides nanostructures can continue to play an importa...