Synthesis and characterization of metal silicides nanostructures

• 主要作者: Li, Shaozhou.
• 其他作者: School of Materials Science & Engineering
• 格式: Theses and Dissertations
• 語言: English
• 出版: 2013
• 主題: DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Nanoelectronics and interconnects
• 在線閱讀: http://hdl.handle.net/10356/51007
• 機構: Nanyang Technological University

Metal silicides have been used extensively in microelectronics devices, such as contacts and local interconnects. With increasing research and development of a bottomup fabrication approach for semiconducting and metallic nanostructures, metal silicides nanostructures can continue to play an importa...