Copper nanowires bonding for three dimensional interconnections
Over the past few decades, the semiconductor industry has been advancing by increasing transistor density on a microchip through continuous device scaling based on the technology roadmap driven by Moore’s Law. However, new physical phenomena at scaled dimensions and fundamental limitations in materi...
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Format: | Theses and Dissertations |
Language: | English |
Published: |
2016
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Online Access: | https://hdl.handle.net/10356/69104 |
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Institution: | Nanyang Technological University |
Language: | English |