Design and implementation of automated buffer cycling for applied material (AMAT) chemical vapor deposition (CVD) process producer tool

• Main Author: Lin, Htein
• Other Authors: Shum Ping
• Format: Final Year Project
• Language: English
• Published: 2018
• Subjects: DRNTU::Engineering::Electrical and electronic engineering
• Online Access: http://hdl.handle.net/10356/76319
• Institution: Nanyang Technological University

In the semiconductor manufacturing industry, qualification of the tool is the most important thing to do before the tool is being released to run for production. By doing that, the desired quality and specification of the product is achieved. The tool qualification is need to be done whenever the tool is completed with corrective maintenance or preventive maintenance. The maintenance time of the tool is directly affecting to the quantity of the product output. So the need for the minimum time taken for those corrective maintenance or preventive maintenance is crucial which can lead to more output of products. This project is to design and implementation of automated buffer cycling for Applied Material (AMAT) Chemical Vapor Deposition (CVD) process tool which will reduce time taken and man hours’ requirement. The design was verified and tested with a few tools. And the results were successfully achieved to the requirements. So, the implementation was done across all the tools. Overall, this report is about how the silicon wafers are processed in the chemical vapor deposition (CVD) tools, how the qualification is done before processing the actual wafers as well as how to design and implement according the requirements.