Design and implementation of automated buffer cycling for applied material (AMAT) chemical vapor deposition (CVD) process producer tool

• Main Author: Lin, Htein
• Other Authors: Shum Ping
• Format: Final Year Project
• Language: English
• Published: 2018
• Subjects: DRNTU::Engineering::Electrical and electronic engineering
• Online Access: http://hdl.handle.net/10356/76319
• Institution: Nanyang Technological University

In the semiconductor manufacturing industry, qualification of the tool is the most important thing to do before the tool is being released to run for production. By doing that, the desired quality and specification of the product is achieved. The tool qualification is need to be done whenever the to...