Data analytics on semiconductor ion implantation processes

This project is a spin-off from an industrial project on the application of Robotic Process Automation (RPA) for a Semiconductor Manufacturing firm in Singapore. The manufacturing process of focus in this project is ion implantation. This project seeks to support the main project and the business...

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Bibliographic Details
Main Author: Lee, Chew Peng
Other Authors: Wu Kan
Format: Final Year Project
Language:English
Published: 2019
Subjects:
Online Access:http://hdl.handle.net/10356/78293
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Institution: Nanyang Technological University
Language: English

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