Flatness and warpage measurement of semiconductor wafers

• Main Author: Ang, Mun Ru
• Other Authors: Anand Krishna Asundi
• Format: Final Year Project
• Language: English
• Published: 2019
• Subjects: DRNTU::Engineering::Mechanical engineering
• Online Access: http://hdl.handle.net/10356/78600
• Institution: Nanyang Technological University

The advancement in technology has led to the rise of a form of non-contact three-dimensional optical metrology system known as Phase Measuring Deflectometer (PMD). The ability of the system to perform a non-destructive measurement of high accuracy and high speed at a lower cost in contrast to the tr...