A cantilever-based NEM nonvolatile memory utilizing electrostatic actuation and vibrational deactuation for high-temperature operation

• Main Authors: Gopal, Jayaraman Karthik, Do, Anh Tuan, Singh, Pushpapraj, Chua, Geng Li, Kim, Tony Tae-Hyoung
• Other Authors: School of Electrical and Electronic Engineering
• Format: Article
• Language: English
• Published: 2015
• Subjects: DRNTU::Engineering::Electrical and electronic engineering
• Online Access: https://hdl.handle.net/10356/79383; http://hdl.handle.net/10220/26027
• Institution: Nanyang Technological University

This paper proposes a cantilever-based nanoelectromechanical (NEM) nonvolatile memory (NVM) with a novel write scheme for reliable memory operation at very high-operating temperature (up to 300 °C) in rugged electronics. The memory bit (0/1) is formed by the opening/closing of a cantilever beam. Per...