Grid-based simulation of industrial thin-film production

• Main Authors: Krzhizhanovskaya, Valeria V., Sloot, Peter M. A., Gorbachev, Yu. E.
• Other Authors: School of Computer Engineering
• Format: Article
• Language: English
• Published: 2013
• Online Access: https://hdl.handle.net/10356/84460; http://hdl.handle.net/10220/10144
• Institution: Nanyang Technological University

In this article, the authors introduce a Grid-based virtual reactor, a High Level Architecture (HLA)- supported problem-solving environment that allows for detailed numerical study of industrial thin-film production in plasma-enhanced chemical vapor deposition (PECVD) reactors. They briefly describe...