A nano-actuator via cavity-enhanced optical dipole force

A nano-actuator via cavity-enhanced optical dipole force

In this paper, we demonstrate a nano-actuator using a silicon-based monolithic cavity nano-opto-mechanical system. The nano-actuator is constructed by a special designed nano-scale silicon suspended cantilever which is efficiently driven by the optical gradient force. In experiment, the actuator obt...

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Bibliographic Details
Main Authors: Tao, J. F., Wu, J., Cai, H., Zhang, Q. X., Kun, X., Tsai, J. M., Liu, A. Q., Kwong, Dim Lee.
Other Authors: School of Electrical and Electronic Engineering
Format: Conference or Workshop Item
Language:English
Published: 2013
Subjects:
DRNTU::Engineering::Electrical and electronic engineering
Online Access:https://hdl.handle.net/10356/84753
http://hdl.handle.net/10220/12484
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Institution: Nanyang Technological University
Language: English
Description
Summary:In this paper, we demonstrate a nano-actuator using a silicon-based monolithic cavity nano-opto-mechanical system. The nano-actuator is constructed by a special designed nano-scale silicon suspended cantilever which is efficiently driven by the optical gradient force. In experiment, the actuator obtains a tuning range up to 52 nm. The optical power consumption is reduced to 0.04 mW/nm, which is much smaller than typical value of 3mW/nm in optomechanical systems.

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