A nano-actuator via cavity-enhanced optical dipole force

A nano-actuator via cavity-enhanced optical dipole force

In this paper, we demonstrate a nano-actuator using a silicon-based monolithic cavity nano-opto-mechanical system. The nano-actuator is constructed by a special designed nano-scale silicon suspended cantilever which is efficiently driven by the optical gradient force. In experiment, the actuator obt...

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Main Authors: Tao, J. F., Wu, J., Cai, H., Zhang, Q. X., Kun, X., Tsai, J. M., Liu, A. Q., Kwong, Dim Lee.
Other Authors: School of Electrical and Electronic Engineering
Format: Conference or Workshop Item
Language:English
Published: 2013
Subjects:
DRNTU::Engineering::Electrical and electronic engineering
Online Access:https://hdl.handle.net/10356/84753
http://hdl.handle.net/10220/12484
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Institution: Nanyang Technological University
Language: English
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spelling sg-ntu-dr.10356-847532020-03-07T13:24:45Z A nano-actuator via cavity-enhanced optical dipole force Tao, J. F. Wu, J. Cai, H. Zhang, Q. X. Kun, X. Tsai, J. M. Liu, A. Q. Kwong, Dim Lee. School of Electrical and Electronic Engineering IEEE International Conference on Micro Electro Mechanical Systems (25th : 2012 : Paris, France) DRNTU::Engineering::Electrical and electronic engineering In this paper, we demonstrate a nano-actuator using a silicon-based monolithic cavity nano-opto-mechanical system. The nano-actuator is constructed by a special designed nano-scale silicon suspended cantilever which is efficiently driven by the optical gradient force. In experiment, the actuator obtains a tuning range up to 52 nm. The optical power consumption is reduced to 0.04 mW/nm, which is much smaller than typical value of 3mW/nm in optomechanical systems. 2013-07-29T07:29:46Z 2019-12-06T15:50:46Z 2013-07-29T07:29:46Z 2019-12-06T15:50:46Z 2012 2012 Conference Paper Tao, J. F., Wu, J., Cai, H., Zhang, Q. X., Kun, X., Tsai, J. M., et al. (2012). A nano-actuator via cavity-enhanced optical dipole force . 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS). https://hdl.handle.net/10356/84753 http://hdl.handle.net/10220/12484 10.1109/MEMSYS.2012.6170360 en © 2012 IEEE.
institution Nanyang Technological University
building NTU Library
country Singapore
collection DR-NTU
language English
topic DRNTU::Engineering::Electrical and electronic engineering
spellingShingle DRNTU::Engineering::Electrical and electronic engineering
Tao, J. F.
Wu, J.
Cai, H.
Zhang, Q. X.
Kun, X.
Tsai, J. M.
Liu, A. Q.
Kwong, Dim Lee.
A nano-actuator via cavity-enhanced optical dipole force
description In this paper, we demonstrate a nano-actuator using a silicon-based monolithic cavity nano-opto-mechanical system. The nano-actuator is constructed by a special designed nano-scale silicon suspended cantilever which is efficiently driven by the optical gradient force. In experiment, the actuator obtains a tuning range up to 52 nm. The optical power consumption is reduced to 0.04 mW/nm, which is much smaller than typical value of 3mW/nm in optomechanical systems.
author2 School of Electrical and Electronic Engineering
author_facet School of Electrical and Electronic Engineering
Tao, J. F.
Wu, J.
Cai, H.
Zhang, Q. X.
Kun, X.
Tsai, J. M.
Liu, A. Q.
Kwong, Dim Lee.
format Conference or Workshop Item
author Tao, J. F.
Wu, J.
Cai, H.
Zhang, Q. X.
Kun, X.
Tsai, J. M.
Liu, A. Q.
Kwong, Dim Lee.
author_sort Tao, J. F.
title A nano-actuator via cavity-enhanced optical dipole force
title_short A nano-actuator via cavity-enhanced optical dipole force
title_full A nano-actuator via cavity-enhanced optical dipole force
title_fullStr A nano-actuator via cavity-enhanced optical dipole force
title_full_unstemmed A nano-actuator via cavity-enhanced optical dipole force
title_sort nano-actuator via cavity-enhanced optical dipole force
publishDate 2013
url https://hdl.handle.net/10356/84753
http://hdl.handle.net/10220/12484
_version_ 1681049088508821504

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