A nano-actuator via cavity-enhanced optical dipole force

• Main Authors: Tao, J. F., Wu, J., Cai, H., Zhang, Q. X., Kun, X., Tsai, J. M., Liu, A. Q., Kwong, Dim Lee.
• Other Authors: School of Electrical and Electronic Engineering
• Format: Conference or Workshop Item
• Language: English
• Published: 2013
• Subjects: DRNTU::Engineering::Electrical and electronic engineering
• Online Access: https://hdl.handle.net/10356/84753; http://hdl.handle.net/10220/12484
• Institution: Nanyang Technological University

In this paper, we demonstrate a nano-actuator using a silicon-based monolithic cavity nano-opto-mechanical system. The nano-actuator is constructed by a special designed nano-scale silicon suspended cantilever which is efficiently driven by the optical gradient force. In experiment, the actuator obt...