Decoupling robust control of three-link direct drive robot arm

• Main Authors: Zhang, C., Zhao, G., Xiao, Y., Yang, X.
• Other Authors: School of Electrical and Electronic Engineering
• Format: Article
• Language: English
• Published: 2013
• Subjects: DRNTU::Engineering::Electrical and electronic engineering
• Online Access: https://hdl.handle.net/10356/84928; http://hdl.handle.net/10220/10729
• Institution: Nanyang Technological University

This paper introduces the mechanical structure of a three-link direct drive SCARA for wafer handling application. The dynamic modeling of the presented SCARA is derived and the coupling effect of the system is studied. A decoupling method based on computed torque control is employed in the implement...