Slurry flow visualisation of chemical mechanical polishing based on a computational fluid dynamics model

• Main Authors: Tian, Y. B., Lai, S. T., Zhong, Z. W.
• 其他作者: School of Mechanical and Aerospace Engineering
• 格式: Article
• 語言: English
• 出版: 2013
• 在線閱讀: https://hdl.handle.net/10356/85373; http://hdl.handle.net/10220/10684
• 機構: Nanyang Technological University

In this work, we developed a computational fluid dynamics (CFD) model to simulate the slurry flow between the wafers and pad during the chemical mechanical polishing (CMP) process under a multiple-wafer configuration. A serial of simulations were carried out to visualise slurry flow and explore the...