MEMS Tunable Diffraction Grating for Spaceborne Imaging Spectroscopic Applications

• Main Authors: Muttikulangara, Sanathanan Swaminathan, Baranski, Maciej, Rehman, Shakil, Hu, Liangxing, Miao, Jianmin
• Other Authors: School of Mechanical and Aerospace Engineering
• Format: Article
• Language: English
• Published: 2018
• Subjects: Tunable Diffraction Grating; Optical Components
• Online Access: https://hdl.handle.net/10356/88096; http://hdl.handle.net/10220/44525
• Institution: Nanyang Technological University

Diffraction gratings are among the most commonly used optical elements in applications ranging from spectroscopy and metrology to lasers. Numerous methods have been adopted for the fabrication of gratings, including microelectromechanical system (MEMS) fabrication which is by now mature and presents...